Fab Floored

Sellers, David
December 2004
Heating/Piping/Air Conditioning Engineering;Dec2004, Vol. 76 Issue 12, p14
Provides information on the findings of an investigation conducted at a cleanroom pressurization problem in a silicon-wafer fabrication facility. Potential problems discovered during the investigation; Details of a switching error which occurred at a substation; Implication of a gap in the discharge section that mandated a shutdown of the air-handling system.


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