Micromachined fountain pen for atomic force microscope-based nanopatterning

Deladi, S.; Tas, N. R.; Berenschot, J. W.; Krijnen, G. J. M.; de Boer, M. J.; de Boer, J. H.; Peter, M.; Elwenspoek, M. C.
November 2004
Applied Physics Letters;11/29/2004, Vol. 85 Issue 22, p5361
Academic Journal
We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.


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