Hydrocarbon detection via ion implantation in metal–insulator–semiconductor devices

Medlin, J. Will; Bastasz, Robert; McDaniel, Anthony H.
November 2004
Applied Physics Letters;11/29/2004, Vol. 85 Issue 22, p5457
Academic Journal
A method for using metal–insulator–semiconductor (MIS) sensors to detect hydrocarbons is described. In this method, hydrocarbon gases are ionized and focused in an energetic beam onto the surface of a MIS device using an ion gun. This detection scheme is found to be selective to hydrogen-containing compounds, with other species yielding no detectable response. The magnitude of the sensor response is found to be a strong function of the current flux and beam energy. These results suggest that ion implantation in MIS devices may be a useful sensing strategy for detection of various combustible gases.


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