Microdischarge devices with 10 or 30 μm square silicon cathode cavities: pd scaling and production of the XeO excimer

Park, S.-J.; Eden, J. G.; Chen, J.; Liu, C.
November 2004
Applied Physics Letters;11/22/2004, Vol. 85 Issue 21, p4869
Academic Journal
Silicon microplasma devices with square trench cathode cavities having cross sections of (10 μm)2 or (30 μm)2 and a depth of 200 μm have been fabricated and operated successfully in the rare gases and Xe/O2 mixtures at pressures (300 K) up to 1100 Torr. The (10 μm)2 structures exhibit electrical characteristics that contrast with the behavior of larger devices and may indicate the onset of the breakdown of pd scaling. Also, a distinct minimum in the ignition voltage of 10 μm square devices is observed for pd≃0.9 Torr cm (p and d are the Ne gas pressure and microcavity cross-sectional dimension, respectively). Strong emission on the 2 1∑+→1 1∑+ transition of XeO in the green (∼510–560 nm) is observed in mixtures of Xe (300–700 Torr) and O2 (1–10 mTorr).


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