Megasonic-assisted development of nanostructures: Investigations on high aspect ratio nanoholes

Küpper, David; Küpper, Daniel; Georgiev, Yordan M.; Wahlbrink, Thorsten; Henschel, Wolfgang; Bell, Guido; Kurz, Heinrich
November 2004
Applied Physics Letters;11/22/2004, Vol. 85 Issue 21, p5055
Academic Journal
The influence of megasonic agitation on the development of nanostructures with high aspect ratio is investigated thoroughly. The improvements in homogeneity, depth, and quality of nanostructures are related to specific interactions of the sound wave with the resist and developer. Two phases in the development process are operative. The specific role of microstreaming providing physical supply of fresh developer is identified and the reduction of viscosity by megasonic interaction is derived. The advantage of megasonic agitation as a nondestructive development of high aspect ratio nanostructures is demonstrated.


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