Second Generation of Correction Methods in Electron Probe X-ray Microanalysis: Approximation Models for Emission Depth Distribution Functions

Lavrent'ev, Yu. G.; Korolyuk, V. N.; Usova, L. V.
July 2004
Journal of Analytical Chemistry;Jul2004, Vol. 59 Issue 7, p600
Academic Journal
The review is concerned with the present-day correction models used in electron probe x-ray microanalysis (EPXMA). A general approach to constructing models of the excitation distribution function along the target depth is described. Specific correction methods are considered in detail.


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