TITLE

High tunability (Ba,Sr)TiO3 thin films grown on atomic layer deposited TiO2 and Ta2O5 buffer layers

AUTHOR(S)
Il-Doo Kim; Tuller, Harry L.; Hyun-Suk Kim; Park, Jin-Seong
PUB. DATE
November 2004
SOURCE
Applied Physics Letters;11/15/2004, Vol. 85 Issue 20, p4705
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
In this letter, we report on increased tunability of Ba0.6Sr0.4TiO3 (BST) thin films by use of Ta2O5 and TiO2 films as buffer layers between BST and Si substrates. Ta2O5 and TiO2 butler layers were grown by atomic layer deposition (ALD) onto Si substrates followed by pulsed laser deposition of Ba0.6Sr0.4TiO3 thin films onto the buffer layers. The randomly oriented BST films deposited on TiO2/Si substrates exhibited a broader grain size distribution than the (110) textured BST films grown on Ta2O5/Si substrates. At an applied voltage of 10 V, the BST films grown on Ta2O5/Si and TiO2/Si substrates showed much enhanced tunability values of 53.1% and 72.9%, respectively, as compared to the 20.7% value obtained with BST films grown on MgO single crystal substrates. Successful integration of BST low voltage microwave tunable devices onto Si substrates thus appears possible with the aid of ALD grown Ta2O5 or TiO2 butler layers.
ACCESSION #
15075051

 

Related Articles

  • Composition control and electrical properties of PMN-PT thin films around the morphotropic boundary. Wang, J.; Wogn, K.H.; Chan, H.L.W.; Choy, C.L. // Applied Physics A: Materials Science & Processing;2004, Vol. 79 Issue 3, p551 

    We have successfully grown (1-x)Pb(Mg1/3- Nb1/3)O3-xPbTiO3 (PMN-PT) thin films with x=0.3, 0.35 and 0.4 by pulsed laser deposition. X-ray-diffraction studies reveal that the PMN-PT films grown on La0.5Sr0.5CoO3/LaAlO3 substrates form epitaxial heterostructures. Composition control and remedial...

  • Deposition angle-dependent morphology of laser deposited YBa[sub 2]Cu[sub 3]O[sub 7] thin films. Soon-Gul Lee; Doo-Sup Hwang // Applied Physics Letters;8/8/1994, Vol. 65 Issue 6, p764 

    Examines the surface morphology of pulsed laser deposited thin films. Epitaxial growth of the films; Effect of deposition angle on surface morphology, types of particles and number density; Composition of the droplets; Detection of a-oriented grains in the high angle films.

  • Grain size dependence of electrical and optical properties in Nb-doped anatase TiO2. Yang, J. Y.; Li, W. S.; Li, H.; Sun, Y.; Dou, R. F.; Xiong, C. M.; He, L.; Nie, J. C. // Applied Physics Letters;11/23/2009, Vol. 95 Issue 21, p213105 

    Anatase thin films of pure TiO2 and 6% niobium doped TiO2 (Nb:TiO2) were fabricated on LaAlO3(100) by pulsed laser deposition. The electrical properties of Nb:TiO2 films are grain-size dependent, i.e., the larger grain size, the higher conductivity, and mobility. For all TiO2 and for Nb:TiO2...

  • Critical parameters influencing the material distribution produced by pulsed laser deposition. del Coso, R.; Perea, A.; Serna, R.; Chaos, J.A.; Gonzalo, J.; Solis, J. // Applied Physics A: Materials Science & Processing;1999, Vol. 69 Issue 7, pS553 

    Abstract. The parameters that control the thickness distribution of thin films produced by pulsed laser deposition are investigated. It is found that highly asymmetric material distribution profiles can be obtained in vacuum when high energy densities are used and the target surface is...

  • Large-area pulsed laser deposition of YBCO thin films: homogeneity and surface. Schey, B.; Biegel, W.; Kuhn, M.; Stritzker, B. // Applied Physics A: Materials Science & Processing;1999, Vol. 69 Issue 7, pS419 

    Abstract. YBCO thin films and buffer layers are deposited by a special PLD setup with an 8-cm line focus on cylindrical targets and substrate scanning perpendicular to it. Different kinds of substrates (SrTiO[sub 3], MgO, LaAlO[sub 3], Y-ZrO[sub 2] and sapphire) as large as 7 x 20 cm[sup 2] were...

  • High-frequency electromagnetic properties of epitaxial Bi2FeCrO6 thin films grown by pulsed laser deposition. A├»ssa, Brahim; Nechache, Riad; Therriault, Daniel; Rosei, Federico; Nedil, Mourad // Applied Physics Letters;10/31/2011, Vol. 99 Issue 18, p183505 

    We report on the electromagnetic (EM) properties in high-frequency domain (HF) of multiferroic Bi2FeCrO6 (BFCO) thin films. The films were epitaxially grown on SrTiO3 substrates by pulsed laser ablation. Typical 50 nm-thick BFCO films having both (111) and (001) orientations were investigated....

  • Precipitation of a metastable Fe(Ag) solid solution upon annealing of supersaturated Fe(Ag) thin film prepared by pulsed laser deposition. Liu, F. // Applied Physics A: Materials Science & Processing;Oct2005, Vol. 81 Issue 5, p1095 

    Upon annealing, a single-phase, bcc Fe1-xAgx (x=1.8 or 3.2 at. %) thin film, prepared by pulsed laser deposition, simultaneously undergoes grain growth and precipitation of a bcc Fe(Ag,9-10 at. %) solid solution at the grain boundaries. At a high annealing temperature or after a long annealing...

  • Low-temperature laser processes for synthesizing (100)-textured Pb(Zr,Ti)O3 thin films on Si substrate. Chu, Y. H.; Lin, S. J.; Liu, K. S.; Lin, I. N. // Applied Physics A: Materials Science & Processing;Oct2005, Vol. 81 Issue 5, p1059 

    High-performance Pb(Zr,Ti)O3, PZT, thin films were synthesized on Si substrates by using low-temperature laser-assisted processes, which combine pulsed laser deposition (PLD), laser lift-off (LLO) and laser-annealing (LA) processes. The PZT films were first grown on sapphire substrates at 400...

  • Layer-by-layer growth and magnetic properties of Y3Fe5O12 thin films on Gd3Ga5O12. Krockenberger, Y.; Yun, K.-S.; Hatano, T.; Arisawa, S.; Kawasaki, M.; Tokura, Y. // Journal of Applied Physics;Dec2009, Vol. 106 Issue 12, p123911 

    We report on the layer-by-layer growth of epitaxial yttrium-iron-garnet (Y3Fe5O12) thin films on (111) and (110) Gd3Ga5O12 substrates as verified by the intensity oscillations of reflection high energy electron diffraction during pulsed laser deposition. X-ray diffraction indicates pseudomorphic...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics