Structural transformation and field emission enhancement of carbon nanofibers by energetic argon plasma post-treatment

Weng, C.H.; Leou, K.C.; Wei, H.W.; Juang, Z.Y.; Wei, M.T.; Tung, C.H.; Tsai, C.H.
November 2004
Applied Physics Letters;11/15/2004, Vol. 85 Issue 20, p4732
Academic Journal
Vertically aligned carbon nanofilters (CNFs) grown by plasma enhanced chemical vapor deposition (PECVD) were transformed into cone-shaped nanostructures after treatment by argon (Ar) plasma. Significant enhancement of field emission characteristics of the post-treated CNFs has been achieved. Analysis by electron microscopy and energy dispersive spectroscopy (EDS) suggests that the structural transformation is a result of a cosputtering/deposition process by energetic plasma ions. The enhancements can he attributed to the combining effects of an additional Si/C layer coverage, catalytic nanoparticles removal and the sharpening of CNFs tips. The argon plasma post-treatment processes developed here can he easily extended to in situ PECVD processes for fabricating CNFs based emitters.


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