November 2004
Microlithography World;Nov2004, Vol. 13 Issue 4, p26
Trade Publication
Presents news briefs on several companies in the microlithography sector as of November 2004. Agreement of Sigma-C GmbH with Photronics Inc.; Information on the 193nanometer immersion-lithography program of IMEC research center; Amount received by the University of Central Florida from the Space Technology Division of Northrop Grumman.


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