TITLE

Thermal expansion of Ti-containing hydrogenated amorphous carbon nanocomposite thin films

AUTHOR(S)
Shi, B.; Meng, W. J.; Daulton, T. L.
PUB. DATE
November 2004
SOURCE
Applied Physics Letters;11/8/2004, Vol. 85 Issue 19, p4352
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The effective coefficients of thermal expansion (CTE) of Ti-containing hydrogenated amorphous carbon (Ti–C:H) thin films were measured. Ti–C:H thin films with compositions ranging from nearly pure a-C:H to nearly pure TiC were deposited on Si(100) substrates. Effective CTEs were determined from temperature induced changes in the curvature of film/substrate assemblies. Measured effective CTE values for Ti–C:H are ∼5.7×10-6 K-1, and show little dependence on the Ti composition.
ACCESSION #
14974982

 

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