Efficient plasma source providing pronounced density peaks in the range of very low magnetic fields

Sato, G.; Oohara, W.; Hatakeyama, R.
November 2004
Applied Physics Letters;11/1/2004, Vol. 85 Issue 18, p4007
Academic Journal
Radio-frequency discharges are performed in low magnetic fields (0-0 mT) using three types of helicon-wave exciting antennas with the azimuthal mode number of ¦m¦ =1. The most pronounced peak of plasma density is generated in the case of a phased helical antenna at only a few mT, where the helicon wave with in m = + 1 is purely excited and propagates. An analysis based on the dispersion relation well explains the density-peak phenomenon in terms of the correspondence between the antenna one-wavelength and the helicon wavelength, bringing forth the optimization principle of plasma source design in very low magnetic fields.


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