TITLE

In situ real time process characterization in nanoimprint lithography using time-resolved diffractive scatterometry

AUTHOR(S)
Zhaoning Yu; He Gao; Chou, Stephen Y.
PUB. DATE
November 2004
SOURCE
Applied Physics Letters;11/1/2004, Vol. 85 Issue 18, p4166
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
To optimize nanoimprint lithography (NIL), it is essential to be able to characterize and control the NIL process in situ and in real time. Here, we present a method for in situ real-time NIL process characterization using time-resolved diffractive scatterometry (TRDS). A surface relief diffraction grating is used as the imprint mold, and the diffracted light intensity is monitored continuously during the imprint process. We use a scalar diffraction model to calculate the diffraction intensity as a function of the mold penetration ratio. Simulations show good agreement with the experimental results. Our results indicate that TRDS offers a powerful characterization tool that can be used for in situ, real-time NIL process control.
ACCESSION #
14945466

 

Related Articles

  • Innoventor Chooses PXI Platform for Industrial Automation. Hammond, Sam // Instrumentation Newsletter;2004 4th Quarter, Vol. 16 Issue 4, p23 

    This article reports that Innoventor Solutions Inc. is a producer of custom designs and hardware for plant modernization, process improvement, critical process control, testing and verification, and specialty equipment. With the PXI platform, we could easily synchronize industrial digital I/O,...

  • Some Methods of Automatic Control of Relative Motion of Objects in Near-Earth Orbits. Nazirov, R. R.; Sidorov, I. M.; Frolov, V. A. // Cosmic Research;Jan/Feb2003, Vol. 41 Issue 1, p74 

    The methods of automatic control of motion of a free-flight platform near the orbital space station are considered. The satellite-inspector intended for service of the International Space Station is an example of such objects. The algorithms of control of the platform motion along a trajectory...

  • Models of mob control. Breer, V.; Novikov, D. // Automation & Remote Control;Dec2013, Vol. 74 Issue 12, p2143 

    A threshold model of behavior is considered for a group of agents. Making binary decisions (choosing between active or passive states), agents take into account the choice of other members of the group. Control problem for thresholds and agents' reputation is stated and solved in order to...

  • Centralised or distributed?  // Process & Control Engineering (PACE);Oct2005, Vol. 58 Issue 9, p26 

    The article compares the automation of an assembly line with centralized control technology or with decentralized or distributed control technology. The two options are compared in terms of hardware, software, fieldbus, input-output devices and motion control devices required. Simple topology is...

  • Signal differentiation in automatic control systems. Emel'yanov, S.; Afanas'ev, A. // Automation & Remote Control;Dec2015, Vol. 76 Issue 12, p2110 

    Realization of the traditional approaches to differentiation of signals in the automatic control systems is hindered by the negative effect of gain on the accuracy of differentiation and stability to high-frequency noise. An approach was proposed based on representing the considered signal as a...

  • Research on the force-position switching control system of wire bonding head on DSP. Yonggang Chen; Qiusheng Yan; Hangjun Gong // Applied Mechanics & Materials;2014, Issue 511-512, p1118 

    Presented the force-position switching control system of wire bonding head on DSP. Analysis of the bond head mechanism design theory,for wire bonding high precision motion control requires, design of the force-position switching control system hardware and software.

  • Metrology for Grayscale Lithography. Murali, Raghunath // AIP Conference Proceedings;9/26/2007, Vol. 931 Issue 1, p419 

    Three dimensional microstructures find applications in diffractive optical elements, photonic elements, etc. and can be efficiently fabricated by grayscale lithography. Good process control is important for achieving the desired structures. Metrology methods for grayscale lithography are...

  • Implementation of Inverted Pendulum Control, Plunks on Miscellaneous Tactics. Tahir, A.; Yasin, J. // International Journal of Electrical & Computer Sciences;Aug2012, Vol. 12 Issue 4, p45 

    The balancing of an Inverted Pendulum by moving a cart in horizontal direction is an orthodox hitch in the region of control theory and engineering. This paper inspects the nonlinear model designing, system analysis, and control implementation of Inverted Pendulum. In order to regulate the whole...

  • An Automated Sorting System Based on Virtual Instrumentation Techniques. Tarnovan, I. G.; Holonec, Rodica // International Journal of Online Engineering;2008, Vol. 4 Issue S1, p31 

    The application presented in this paper represents an experimental model and it refers to the implementing of an automated sorting system for pieces of same shape but different sizes and/or colors. The classification is made according to two features: the color and weight of these pieces. The...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics