Rayleigh scattering, mode coupling, and optical loss in silicon microdisks

Borselli, Matthew; Srinivasan, Kartik; Barclay, Paul E.; Painter, Oskar
October 2004
Applied Physics Letters;10/25/2004, Vol. 85 Issue 17, p3693
Academic Journal
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 μm are studied, with measured quality factors as high as 4.7×105 for an optical mode volume of 5.3 (λ/n)3.


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