Theoretical optimization of the self-organized growth of nanoscale arrays through a figure of merit

Vasco, E.
October 2004
Applied Physics Letters;10/25/2004, Vol. 85 Issue 17, p3714
Academic Journal
A figure of merit is proposed in order to optimize the self-organized growth of nanoscale elements into one-/two-dimensional arrays via a fine selection of the deposition/annealing conditions. This figure of merit has been designed to account for the most significant defects inherent in such arrays. Its versatility has been studied by kinetic Monte Carlo simulations of self-organized growth of metal clusters on the 7×7 reconstructed Si(111) surface. The optimization relationships between deposition/annealing conditions and characteristics of the metal-on-Si(111)7×7 systems are obtained and analyzed within the framework of competition between thermodynamical tendencies and kinetic limitations.


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