TITLE

Precise formation of nanoscopic dots on polystyrene film using z-lift electrostatic lithography

AUTHOR(S)
Juhl, Shane; Phillips, David; Vaia, Richard A.; Lyuksyutov, Sergei F.; Paramonov, Pavel B.
PUB. DATE
October 2004
SOURCE
Applied Physics Letters;10/25/2004, Vol. 85 Issue 17, p3836
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Z-lift electrostatic lithography on thin (10–50 nm) polystyrene (PS) films is discussed. The height of nanostructures can be controlled via mechanically drawing or depressing the cantilever height (z-lift) during the application of a voltage. Since polymer is not removed or crosslinked during structure formation, the features are erasable. Various aspects such as voltage doses, film thickness, z-lift height, and rate are explored. Structure height formation relies mainly on, and is proportional, to the z-lift magnitude; however, only a narrow range of voltages yields structures for any given film thickness. Structures ranging from 0–10 nm are produced on a 40 nm thick PS film using -36 V by varying the z-lift on a 0.1–0.9 N/m cantilever from -20 nm to +400 nm.
ACCESSION #
14909811

 

Related Articles

  • Arrays of ordered nanostructures in Fe-Pt thin films by self-assembling of polystyrene nanospheres. Tiberto, Paola; Barrera, Gabriele; Boarino, Luca; Celegato, Federica; Coïsson, Marco; De Leo, Natascia; Albertini, Franca; Casoli, Francesca; Ranzieri, Paolo // Journal of Applied Physics;May2013, Vol. 113 Issue 17, p17B516 

    Large-area arrays of dots having diameter ranging in the interval 80-400 nm were obtained by polystyrene nanosphere (PN) lithography in L10-FePt thin films. Fe53Pt47 thin films (thickness 10 nm) were epitaxially deposited by rf sputtering on a MgO(100) substrate heated at 400 °C to promote...

  • Magnetic and magnetotransport properties of arrays of nanostructured antidots obtained by self-assembling polystyrene nanosphere lithography. Tiberto, Paola; Boarino, Luca; Celegato, Federica; Coïsson, Marco; De Leo, Natascia; Vinai, Franco; Allia, Paolo // Journal of Applied Physics;May2010, Vol. 107 Issue 9, p09B502-1 

    A well-ordered nanopatterned structure has been obtained in sputtered magnetic thin films by self-assembling of polystyrene nanospheres. Arrays of holes in Co, Ni, and Ni80Fe20 films having a mean size ranging in the interval of 200–400 nm depending on the experimental condition have been...

  • Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique. Shenghua Sun; Peng Lu; Jun Xu; Ling Xu; Kunji Chen; Qimin Wang; Yuhua Zuo // Nano-Micro Letters;2013, Vol. 5 Issue 1, p18 

    Nano-structured photon management is currently an interesting topic since it can enhance the optical absorption and reduce the surface reflection which will improve the performance of many kinds of optoelectronic devices, such as Si-based solar cells and light emitting diodes. Here, we report...

  • Laser nano-fabrication of large-area plasmonic structures and surface plasmon resonance tuning by thermal effect. Ma, F.; Hong, M.; Tan, L. // Applied Physics A: Materials Science & Processing;Dec2008, Vol. 93 Issue 4, p907 

    A simple and flexible technique aimed to generate large-area periodic nano-dot array features on metal thin films by laser interference lithography (LIL) has been demonstrated. In this paper, gold nano-dot arrays with a period of ∼450 nm and a dot diameter of ∼100 nm on quartz...

  • Acceptor deactivation in individual silicon nanowires: From thick to ultrathin. Xin Ou; Geyer, Nadine; Kögler, Reinhard; Werner, Peter; Skorupa, Wolfgang // Applied Physics Letters;6/20/2011, Vol. 98 Issue 25, p253103 

    We investigate the doping behavior in the ultrathin part of individual free standing spicular or conic silicon nanowires (NWs) by measuring the local resistivity of the NWs using scanning spreading resistance microscopy. The NWs are boron-doped and the doping efficiency is found to dramatically...

  • Nanomesa and nanowell formation in Langmuir–Blodgett polyvinylidene fluoride trifluoroethylene copolymer films. Jiangyu Li; Yang Luo; Mengjun Bai; Ducharme, Stephen // Applied Physics Letters;11/21/2005, Vol. 87 Issue 21, p213116 

    In this letter, we report an energetics-based model to explain the self-organizing nanomesa and nanowell patterns recently observed in Langmuir-Blodgett (LB) films of polyvinylidene fluoride trifluoroethylene [P(VDF-TrFE)] copolymers. The feature size of nanomesas and nanowells has been...

  • Characterization of electrodeposited nanostructured macroporous cobalt films using polystyrene sphere templates. EL-HALLAG, I. S. // Materials Science (0137-1339);2010, Vol. 28 Issue 1, p245 

    The electrodeposition of highly ordered macroporous films of cobalt with regular arrays of spherical pores of the diameters 200, 550, 600, 750 and 1000 nm was carried out into the interstitial spaces of a template formed by polystyrene latex spheres. The spheres were self-assembled on flat gold...

  • Dynamic anisotropy and heterogeneity of polystyrene thin films as studied by inelastic neutron scattering. Inoue, R.; Kanaya, T.; Nishida, K.; Tsukushi, I.; Taylor, J.; Levett, S.; Gabrys, B. J. // European Physical Journal E -- Soft Matter;Sep2007, Vol. 24 Issue 1, p55 

    We studied the dynamic anisotropy and heterogeniety of polystyrene thin films in glassy state with inelastic neutorn scattering. Adjusting the scattering vector to the directions parallel and perpendicular to the film surface, we observed the elastic scattering intensities as a function of...

  • Confinement and flow dynamics in thin polymer films for nanoimprint lithography. Teisseire, Jérémie; Revaux, Amélie; Foresti, Maud; Barthel, Etienne // Applied Physics Letters;1/3/2011, Vol. 98 Issue 1, p013106 

    In nanoimprint lithography (NIL) viscous flow in polymeric thin films is the primary mechanism for the generation and the relaxation of the structures. Here we quantify the impact of confinement on the flow rate. Pattern relaxation experiments were carried out above the glass transition...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics