Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices

Huang, Yanyi; Paloczi, George T.; Poon, Joyce K. S.; Yariv, Amnon
October 2004
Applied Physics Letters;10/11/2004, Vol. 85 Issue 15, p3005
Academic Journal
We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses.


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