TITLE

A grating-assisted resonant-cavity-enhanced optical displacement detection method for micromachined sensors

AUTHOR(S)
Lee, Wook; Hall, Neal A.; Degertekin, F. Levent
PUB. DATE
October 2004
SOURCE
Applied Physics Letters;10/11/2004, Vol. 85 Issue 15, p3032
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We present an integrated optical displacement sensing method for microscale sensors which is based on an asymmetric Fabry–Perot etalon structure with an embedded phase-sensitive diffraction grating. Analytical modeling of the structure shows that the etalon significantly improves the detection sensitivity as compared to a regular optical interferometer and the embedded diffraction grating enables integration of optoelectronics in a small volume. The efficacy of the method is experimentally validated on a surface micromachined diffraction-based opto-acoustic sensor fabricated on a quartz wafer. A 15 nm silver layer is used to form the bottom mirror of the etalon structure with a sensor membrane and embedded diffraction grating made of aluminum. Comparison of the results with and without the etalon shows an 8 dB increase in detection sensitivity with the etalon structure, which should be further enhanced with the use of low-loss dielectric mirrors.
ACCESSION #
14909524

 

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