High-resolution diffuse x-ray scattering from threading dislocations in heteroepitaxial layers

Daniš, S.; Holý, V.; Zhong, Z.; Bauer, G.; Ambacher, O.
October 2004
Applied Physics Letters;10/11/2004, Vol. 85 Issue 15, p3065
Academic Journal
Diffuse x-ray scattering from epitaxial layers with screw dislocations perpendicular to the surface is calculated assuming correlated dislocation positions. The resulting intensity distribution was compared with a reciprocal-space map measured in a symmetric diffraction from a hexagonal GaN(0001) layer, and a good correspondence was achieved. From the fit, both the dislocation density and their correlation length were determined.


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