Leaky surface acoustic waves in Z-LiNbO3 substrates with epitaxial AIN overlays

Bu, G.; Ciplys, D.; Shur, M. S.; Namkoong, G.; Doolittle, W. A.; Hunt, W. D.
October 2004
Applied Physics Letters;10/11/2004, Vol. 85 Issue 15, p3313
Academic Journal
The properties of leaky surface acoustic waves (LSAW) in MBE grown AIN layer on Z-cut LiNbO3 structures have been studied by numerical simulation and experimental measurements and compared with those of Rayleigh waves in the same structure. In the range of AIN layer thicknesses studied (0


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