Mechanical aspects of epitaxial ferroelectric Pb(Zr0.5Ti0.5)O3 films investigated by nanoindentation methods and piezoresponse force microscopy

Liu, D.; White, K.W.
October 2004
Applied Physics Letters;10/18/2004, Vol. 85 Issue 16, p3459
Academic Journal
Mechanical behaviors of a lead zirconium titanate (PZT) thin film are investigated using a unique combination of nanoindentation methods and piezoresponse force microscopy (PFM) in various domain areas, following local domain pattern writing. The interaction between the ferroelectric domain character and the mechanical behavior is mapped using PFM for subsequent nanoindentation. Significant anisotropic behaviors between (100) and (001) domains are observed. An anomalous increase of indentation elastic modulus in the region near a domain wall is observed.


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