Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces

Goluch, Edgar D.; Shaikh, Kashan A.; Kee Ryu; Chen, Jack; Engel, Jonathan; Chang Liu
October 2004
Applied Physics Letters;10/18/2004, Vol. 85 Issue 16, p3629
Academic Journal
We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest. We demonstrate metal resistors with 100-μm-wide traces fabricated on planar and curved surfaces. The surface profile, mechanical gauge factor, and temperature coefficient of resistance have been characterized. Application of the resistors as hot-wire flow sensors has also been demonstrated.


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