Microlens reflector for out-of-plane optical coupling of a waveguide to a buried silicon photodiode

Nathan, Menachem
October 2004
Applied Physics Letters;10/4/2004, Vol. 85 Issue 14, p2688
Academic Journal
A photoresist microlens is shown to be an extremely efficient reflective element for out-of-plane coupling of light from a negative epoxy-based photoresist (SU8) optical waveguide into a buried silicon pn photodetector. Experimentally determined coupling efficiencies are given for integrated waveguide/photodetector and waveguide/microlens/photodetector structures. The highest measured coupling efficiency in a structure with a 40 μm diameter, 13 μm high microlens is about 74%, versus an average of about 11% in structures without a microlens. The measured microlens-mediated coupling efficiency is in satisfactory agreement with a simple ray tracing simulation that provides a calculated value of 77.5% for the coupling efficiency.


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