TITLE

Fabrication of high-resolution zone plates with wideband extreme-ultraviolet holography

AUTHOR(S)
Solak, Harun H.; David, Christian; Gobrecht, Jens
PUB. DATE
October 2004
SOURCE
Applied Physics Letters;10/4/2004, Vol. 85 Issue 14, p2700
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report an achromatic holographic method to fabricate high-resolution x-ray optics using coherent extreme-ultraviolet radiation from an undulator source. The interference pattern between two spherical beams, which are created using Fresnel zone plates, is recorded to produce a higher-resolution zone plate. Analytical and simulation results showing the formation of the zone plate pattern was confirmed experimentally with the production and testing of a lens with 60-nm outermost zone width. The combination of extreme-ultraviolet light, which exposes photoresists with practically no proximity effect, and holography, which guarantees the accurate placement of zones, addresses the main difficulties faced in the improvement of the resolution of x-ray lenses. Holography with extreme-ultraviolet light has the potential to produce lenses with sub-10-nm resolution.
ACCESSION #
14713414

 

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