TITLE

Thin biaxially textured TiN films on amorphous substrates prepared by ion-beam assisted pulsed laser deposition

AUTHOR(S)
Hühne, R.; Fähler, S.; Holzapfel, B.
PUB. DATE
October 2004
SOURCE
Applied Physics Letters;10/4/2004, Vol. 85 Issue 14, p2744
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Thin TiN films have been grown using reactive ion-beam assisted pulsed laser deposition. The texture development was in situ analyzed using reflection high-energy electron diffraction. Above 300 °C a sharp cube textured nucleation layer is observed using an ion beam with energies above 400 eV under an angle of 45° relative to the substrate normal. The cube texture is not stable during further ion-beam assisted growth but can be preserved using homoepitaxial growth. Resulting films showed an in-plane orientation of about 13°. The texture development can be described in terms of energy considerations and anisotropic sputter rates.
ACCESSION #
14713400

 

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