Planar thin film YBa2Cu3O7-δ Josephson junction pairs and arrays via nanolithography and ion damage

Chen, Ke; Cybart, Shane A.; Dynes, R. C.
October 2004
Applied Physics Letters;10/4/2004, Vol. 85 Issue 14, p2863
Academic Journal
We have fabricated in-plane high-Tc Josephson junction pairs and series arrays using our established nanolithography and ion damage process. Junctions in a pair showed nearly identical electrical properties. The ten-junction array exhibited current–voltage characteristics that can be described by the resistively shunted junction model at 78 K. Flat giant Shapiro steps were observed in both cases. We believe that the ion-damaged high-Tc superconducting Josephson junction is a good candidate to form large numbers of junctions in series arrays that can function above 77 K for quantum voltage standards and other applications.


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