Anti-stiction coatings improve MEMS reliability

Gunda, Nilesh; Jha, Santosh K.; Sastri, Suri A.
October 2004
Portable Design;Oct2004, Vol. 10 Issue 10, p18
The growth rate for micro-electromechanical systems (MEMS) exceeds that of the semiconductor industry. MEMS are very small integrated devices that combine electrical and mechanical components and replicate the structure and function of meter-scale devices used in day-to-day life. Despite the exciting growth predictions for MEMS, the difficulty in controlling surface forces is a critical impediment to the fabrication and operation of many MEMS devices. Surface phenomena such as wear and stiction of the tiny moving parts often restrict the operational environment and limit the lifetime of these devices. Therefore in this article, the author focuses on anti-stiction coatings to improve MEMS reliability.


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