TITLE

Tech Briefs

PUB. DATE
January 1999
SOURCE
Solid State Technology;Jan99, Vol. 42 Issue 1, p18
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Presents news briefs pertaining to the semiconductor industrial equipment industry. Plans of MCNC's MEMS Technology Application Center to supply commercial-quality mask blanks for Lucent's scattering with angular limitation projection electron lithography (SCALPEL) program; NIST scientists' development of a mathematical theory for measuring the viscosity of polymers in thin layers.
ACCESSION #
1470413

 

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