TITLE

Comparison of large-scale layer-relaxation simulations with experiment

AUTHOR(S)
Schwarz, K. W.; Cai, J.; Mooney, P. M.
PUB. DATE
September 2004
SOURCE
Applied Physics Letters;9/20/2004, Vol. 85 Issue 12, p2238
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Recent experiments on the strain relaxation of SiGe layers are related to basic dislocation theory via numerical calculations based on discrete dislocation dynamics. Excellent quantitative agreement is obtained, demonstrating that such technologically interesting problems can be treated on a fundamental level.
ACCESSION #
14546708

 

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