Standard Open Tool Packages for MEMS-enabled Products

Da Silva, Mark
September 2004
Advanced Packaging;Sep2004, Vol. 13 Issue 9, p26
Trade Publication
Discusses standard open tool packages for microelectromechanical system (MEMS) devices. Packaging costs of MEMS devices; Difference between packaging MEMS components from microelectronics; MEMS packaging complexity; Packaging during the design phase.


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