TITLE

Visualization of buried SiGe quantum dots at cleavages by cross-sectional atomic force microscopy

AUTHOR(S)
Dunaevskii, M. S.; Titkov, A. N.; Krasilnik, Z. F.; Novikov, A. V.; Lobanov, D. N.; Laiho, R.
PUB. DATE
September 2004
SOURCE
Applied Physics Letters;9/13/2004, Vol. 85 Issue 11, p1999
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Cross-sectional atomic force microscopy (XAFM) is used to visualize in ambient atmosphere SiGe quantum dots (QDs) embedded in Si. Buried QDs are revealed as nanometer high topographic features on cross-sectional cleavages of the samples. Details of the images are used to get information about strain relaxation of the QDs and its relationship with the shape of the surface relief. We propose XAFM as a simple method to check the presence of QDs and to estimate their sizes and surface density. This method also allows detailed investigation of effects related to vertical alignment of the dots in different layers of multilayer QD structures.
ACCESSION #
14434597

 

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