Fabrication of three-dimensional photonic crystals using silicon micromachining

Venkataraman, Sriram; Schneider, Garrett J.; Murakowski, Janusz; Shi, Shouyuan; Prather, Dennis W.
September 2004
Applied Physics Letters;9/13/2004, Vol. 85 Issue 11, p2125
Academic Journal
We propose a method for the fabrication of three-dimensional photonic-crystal structures using conventional planar silicon micromachining. The method utilizes a single planar etch mask coupled with time-multiplexed, sidewall-passivating, deep anisotropic reactive-ion etching, to create an array of spherical voids with three-dimensional symmetry. Preliminary results are presented that demonstrate the feasibility of the approach.


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