Planar optical waveguides in β-BaB2O4 produced by oxygen ion implantation at low doses

Xue-Lin Wang; Feng Chen; Ke-Ming Wang; Qing-Ming Lu; Ding-Yu Shen; Rui Nie
August 2004
Applied Physics Letters;8/30/2004, Vol. 85 Issue 9, p1457
Academic Journal
The planar waveguides have been fabricated in z-cut β-BaB2O4 crystal by 2.2 MeV O+ ion implantation at doses ranging from 5×1012 to 5×1014 ions/cm2 at room temperature. The waveguides were characterized by the prism-coupling method. Monomode, nonleaky planar waveguides at λ=633 nm in β-BBO single crystals were fabricated at doses from 5×1012 to 2×1013 ions/cm2, and two mode and three mode waveguides were fabricated at doses from 4×1013 to 5×1014 ions/cm2, respectively. The refractive index profiles of the waveguides are reconstructed using reflectivity calculation method. The propagation loss of the measured ion implanted waveguide was about 1.6 dB/cm. It was found that positive changes of extraordinary refractive indices happened in the guiding regions, and such changes increased with the doses, which were different from most of the observed ion-implanted waveguides.


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