Micromachined SrTiO3 single crystals as dielectrics for electrostatic doping of thin films

Bhattacharya, A.; Eblen-Zayas, M.; Staley, N. E.; Huber, W. H.; Goldman, A. M.
August 2004
Applied Physics Letters;8/9/2004, Vol. 85 Issue 6, p997
Academic Journal
Single crystal substrates of SrTiO3 have been micromachined locally on their back faces to thicknesses between 10 and 100 μm using a mechanical abrasive technique. Subsequently, the growth surface has been treated to obtain atomically smooth unit cell terraces, suitable for high quality interfaces. Using a capacitor geometry, surface charge densities suitable for electrostatic doping of films have been obtained at the lowest temperatures, and the off-diagonal component of strain due to the applied electric field has been measured.


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