Instant curvature measurement for microcantilever sensors

Jeon, Sangmin; Thundat, Thomas
August 2004
Applied Physics Letters;8/9/2004, Vol. 85 Issue 6, p1083
Academic Journal
A multiple-point deflection technique has been developed for the instant measurement of microcantilever curvature. Eight light-emitting diodes are focused on various positions of a gold-coated silicon cantilever through optical fibers, and temperature change or chemical adsorption induces cantilever bending. The deflection at each point on the cantilever is measured with subnanometer precision by a position-sensitive detector, and thus the curvature of the cantilever is obtained.


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