SVG unveils 157nm plans

December 1998
Electronic News;12/14/98, Vol. 44 Issue 2249, p24
Trade Publication
Focuses on the lithography roadmap unveiled by Silicon Valley Group (SVG) at the 1998 annual Sematech next-generation lithography (NGL) meeting in Colorado Springs, Colorado. Equipment supplier's support for extreme ultraviolet (EUV) champion team in supplying a commercialization plan; Confirmation that SGV has not joined the U.S. Advanced Lithography LLC; Potential of EUV lithography.


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