InP photonic crystal membrane structures: Fabrication accuracy and optical performance

Xing, Aimin; Darvanco, Marcelo; Blumenthal, Daniel J.; Hu, Evelyn L.
July 2004
Applied Physics Letters;7/26/2004, Vol. 85 Issue 4, p522
Academic Journal
Two-dimensional photonic crystal membranes with coupled ridge waveguides were fabricated in InP/InGaAsP by using e-beam lithography and reactive ion etching. The optical transmission characteristics were measured and a photonic band gap with better than 20 dB extinction ratio was observed. The band-gap dependence on radius-to-lattice constant ratio (r/a) was numerically and experimentally investigated. Predictable, accurate placement of the band edge by varying r/a is demonstrated.


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