TITLE

Diffusion barrier properties of carboxyl- and amine-terminated molecular nanolayers

AUTHOR(S)
Ganesan, P. G.; Singh, A. P.; Ramanath, G.
PUB. DATE
July 2004
SOURCE
Applied Physics Letters;7/26/2004, Vol. 85 Issue 4, p579
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Molecular nanolayers are attractive for preserving the integrity of Cu-dielectric interface in sub-50 nm interconnect structures. Here, we demonstrate the use of carboxyl- and amine-terminated self-assembled molecular layers (SAMs) to immobilize Cu at the Cu/SiO2 interface. Amine-terminated SAMs at the Cu/SiO2 interface increase the Cu diffusion-induced device failure time by a factor of 3 compared to interfaces without a barrier. Carboxyl-terminated SAMs obtained by grafting succinyl chloride onto the amine-terminated SAM show more than an additional factor of 4 increase in failure time. Coordination complex formation though strong interactions between COOH and Cu+ at the Cu/SAM interface is the likely reason for the effective immobilization of Cu.
ACCESSION #
13885867

 

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