Integrated microfluidic linking chip for scanning probe nanolithography

Kee Suk Ryu; Xuefeng Wang; Shaikh, Kashan; Bullen, David; Goluch, Edgar; Jun Zou; Chang Liu; Mirkin, Chad A.
July 2004
Applied Physics Letters;7/5/2004, Vol. 85 Issue 1, p136
Academic Journal
This letter reports an architecture for a microfluidic chip that dresses (inks) multiple nanolithography tips in a high-density array in a parallel and multiplexed fashion. The microfluidic chip consists of multiple precision patterned thin-film poly(dimethylsiloxane) (PDMS) patches serving as porous inking pads. Inking chemicals are supplied from loading reservoirs to the inking pads through microfluidic channels. The gas-permeable thin PDMS membranes allow ink molecules to diffuse through while preventing bulk liquid from overflowing or evaporating. The inking chip provides high-density inking, easy loading of inks, and reduced evaporation losses. We present the fabrication process and inking of scanning probe contact printing probes and commercial nitride probes.


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