A digital MEMS gyroscope with 40∘/h instability variation in −40∘C to 85∘C

Huang, Fuxiang; Fu, Qiang; Liu, Xiaowei; Zhang, Yufeng; Mao, Zhigang
April 2019
International Journal of Modern Physics B: Condensed Matter Phys;Apr2019, Vol. 33 Issue 9, pN.PAG
Academic Journal
This paper presents a digital MEMS gyroscope with 40 ∘ /h instability variation in −40 ∘ C to 85 ∘ C, performing 5 ∘ /h instability variation at normal temperature and 0.01% nonlinearity in the range of ±400 ∘ /s. This stability was achieved by using temperature compensation for the zero-output value changed after the temperature signal. As the resonant frequency of the mechanical structure varied according to the temperature linearly, a frequency calculator was adopted to detect the temperature of the mechanical structure. And the resolution of the frequency could be up to 0.01 Hz with a 1 MHz clock frequency used, obtaining a 10 Hz bandwidth. The driving mode used a PI controller to control a VGA to maintain at a fixed effective value of the driving signal. The sensing mode contained a low noise C/V convertor and a switch demodulation, which could give the angular velocity signal to the A/D convertor. Then the output data of A/D will be compensated in the digital domain. Finally, the digital output of the gyroscope will be available through a normal SPI serial port. The whole circuit was realized on one chip with an active circuit area of 3.5 mm × 5.2 mm fabricated in a 0.35  μ m CMOS technology. And the MEMS structure and circuit are packaged in a 2.5 cm × 2.5 cm × 2.5 cm aluminum mold. The digital output of the gyroscope earned a noise floor of 0.0024 ∘ /s.


Related Articles

  • Characterization of the Bell-Shaped Vibratory Angular Rate Gyro. Ning Liu; Zhong Su; Qing Li; Mengyin Fu; Hong Liu; Junfang Fan // Sensors (14248220);Aug2013, Vol. 13 Issue 8, p10123 

    The bell-shaped vibratory angular rate gyro (abbreviated as BVG) is a novel shell vibratory gyroscope, which is inspired by the Chinese traditional bell. It sensitizes angular velocity through the standing wave precession effect. The bell-shaped resonator is a core component of the BVG and looks...

  • Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft. Zengping Zhang; Fuxue Zhang; Wei Zhang // Sensors (14248220);Aug2013, Vol. 13 Issue 8, p11051 

    This paper presents an approach for realizing a phase difference measurement of a new gyro. A silicon micromachined gyro was mounted on rotating aircraft for aircraft attitude control. Aircraft spin drives the silicon pendulum of a gyro rotating at a high speed so that it can sense the...

  • Rate Sensor Measures Angular Velocity In Harsh Environments.  // Sensors;7/7/2014, p1 

    The article offers brief information on Model 620 angular rate sensor from Measurement Specialties Inc.

  • A New Open-Loop Fiber Optic Gyro Error Compensation Method Based on Angular Velocity Error Modeling. Yanshun Zhang; Yajing Guo; Chunyu Li; Yixin Wang; Zhanqing Wang // Sensors (14248220);2015, Vol. 15 Issue 3, p4899 

    With the open-loop fiber optic gyro (OFOG) model, output voltage and angular velocity can effectively compensate OFOG errors. However, the model cannot reflect the characteristics of OFOG errors well when it comes to pretty large dynamic angular velocities. This paper puts forward a modeling...

  • Integrated structure for a resonant micro-gyroscope and accelerometer. Zega, V.; Comi, C.; Corigliano, A.; Valzasina, C. // Frattura e Integrita Strutturale;2014, Vol. 8, p334 

    This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external...

  • That Fictitious Force. Craig, Kevin C. // Design News;Sep2012, Vol. 67 Issue 9, p26 

    The article presents information on the micro-electro-mechanical system gyroscope found in consumer electronics and smartphone applications. The device that measures angular velocity was created in 1817 for vehicle control, aviation and military purposes. The Coriolis force was significant in...

  • Micro-machined Gyroscope Mathematical Model and Error Analysis. Miaowen Deng; Bing Mo; Chaodong Ling; Ronghai Huang; Suki Kim // Key Engineering Materials;2014, Vol. 609-610, p1144 

    The micro-machined gyroscope that uses Coriolis force to measure angular velocity has non-linear error, which makes the amplitude of angular velocity have a relationship with its frequency, and fabrication technology error, which leads gyroscope's drive shaft and detection shaft not to be...

  • Design of the Digital in Signal Processing Platform of the Gyroscope Based On FPGA. Wang Di; Zhou Jiajun; Chen Song; Yao Ying; Yin Liang; Liu Xiaowei // Key Engineering Materials;2014, Vol. 609-610, p903 

    Gyroscope is a sensor that measure angular velocity which is widely used in various fields. The analog processing technology of Gyro-signal is very mature, but due to the noise and other shortcomings of the analog circuit, the development of micro-mechanical gyroscope is limited. Digital...

  • Error Model and Compensation of Bell-Shaped Vibratory Gyro. Zhong Su; Ning Liu; Qing Li // Sensors (14248220);Sep2015, Vol. 15 Issue 9, p23684 

    A bell-shaped vibratory angular velocity gyro (BVG), inspired by the Chinese traditional bell, is a type of axisymmetric shell resonator gyroscope. This paper focuses on development of an error model and compensation of the BVG. A dynamic equation is firstly established, based on a study of the...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics