Imaging nanostructures with coherent phonon pulses

Daly, B.C.; Holme, N.C.R.; Buma, T.; Branciard, C.; Norris, T.B.; Tennant, D.M.; Taylor, J.A.; Bower, J.E.; Pau, S.
June 2004
Applied Physics Letters;6/21/2004, Vol. 84 Issue 25, p5180
Academic Journal
We demonstrate submicron resolution imaging using picosecond acoustic phonon pulses. High-frequency acoustic pulses are generated by impulsive thermoelastic excitation of a patterned 15-nm-thick metal film on a crystalline substrate using ultrafast optical pulses. The spatiotemporal diffracted acoustic strain field is measured on the opposite side of the substrate, and this field is used in a time-reversal algorithm to reconstruct the object. The image resolution is characterized using lithographically defined 1-micron-period Al structures on Si. Straightforward technical improvements should lead to resolution approaching 45 nm, extending the resolution of acoustic microscopy into the nanoscale regime.


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