Absolute H atom density measurement in pure methane pulsed discharge

Ganquly, B. N.; Parish, J. W.
June 2004
Applied Physics Letters;6/14/2004, Vol. 84 Issue 24, p4953
Academic Journal
Absolute atomic hydrogen and methyl radical production resulting from direct electron impact dissociative excitation of CH4 has been measured in pulsed discharge by two-photon allowed laser induced fluorescence. For 20 Torr pure methane discharge with 480 ns pulse duration, 4–6 kV voltage applied, and 6–11.5 mJ input electrical energy yield of 10–22×1015 cm-3 hydrogen atoms, i.e., up to 4.5% dissociation of CH4 is achieved by direct electron impact with 50% energy conversion efficiency. © 2004 American Institute of Physics.


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