TITLE

Electromechanical coupling coefficient for surface acoustic waves in single-crystal bulk aluminum nitride

AUTHOR(S)
Bu, G.; Ciplys, D.; Shur, M.; Schowalter, L. J.; Schujman, S.; Gaska, R.
PUB. DATE
June 2004
SOURCE
Applied Physics Letters;6/7/2004, Vol. 84 Issue 23, p4611
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The electromechanical coupling coefficient K2 for surface acoustic waves propagating on c and a surfaces of bulk AlN single crystals has been measured using the S11-parameter method in the frequency range of 160–360 MHz. The extracted values of K2 are 0.11% and 0.47% for the c and a surfaces, respectively. By fitting our experimental data to our numerical simulation results, we have estimated piezoelectric constants, which are in a reasonable agreement with literature data. Our results are consistent with the negative sign of the e15 constant. © 2004 American Institute of Physics.
ACCESSION #
13203749

 

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