TITLE

Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon

AUTHOR(S)
Edge, L. F.; Schlom, D. G.; Brewer, R. T.; Chabal, Y. L.; Williams, J. R.; Chambers, S. A.; Hanke, C.; Lucovsky, G.; Yang, Y.; S. Stemmer; Holländer, B.; Schubert, J.; Copel, M.
PUB. DATE
June 2004
SOURCE
Applied Physics Letters;6/7/2004, Vol. 84 Issue 23, p4629
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Amorphous LaAlO3 thin films have been deposited by molecular beam deposition directly on silicon without detectable oxidation of the underlying substrate. We have studied these abrupt interfaces by Auger electron spectroscopy, high-resolution transmission electron microscopy, medium-energy ion scattering, transmission infrared absorption spectroscopy, and x-ray photoelectron spectroscopy. Together these techniques indicate that the films are fully oxidized and have less than 0.2 Å of SiO2 at the interface between the amorphous LaAlO3 and silicon. These heterostructures are being investigated for alternative gate dielectric applications and provide an opportunity to control the interface between the silicon and the gate dielectric. © 2004 American Institute of Physics.
ACCESSION #
13203743

 

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