Characterization of breakdown in ultrathin oxides by hot carrier emission

Tsang, J. C.; Linder, B. P.
June 2004
Applied Physics Letters;6/7/2004, Vol. 84 Issue 23, p4641
Academic Journal
Hot carrier luminescence excited at low voltages across ultrathin gate oxides is used to describe the localized transport during progressive oxide breakdown. The emission identifies the locations of initial breakdown spots in field effect transistors. The transitions from stress-induced leakage currents to reversible breakdown to final breakdown are accompanied by changes in the efficiency of the emission showing an evolution from inelastic to elastic transport. © 2004 American Institute of Physics.


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