TITLE

High-quality radio-frequency inductors on silicon using a hybrid ferrite technology

AUTHOR(S)
Saidani, M.; Gijs, M. A. M.
PUB. DATE
May 2004
SOURCE
Applied Physics Letters;5/31/2004, Vol. 84 Issue 22, p4496
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have realized millimeter-size rf inductors on silicon using a polyimide mold–copper electroplating coil technology. Subsequently, the coils are assembled with magnetic cover plates of commercially available bulk Ni–Zn ferrites of high resistivity. Using the magnetic flux-amplifying ferrite plates, we obtain a 40% enhancement of the inductance and a 25% enhancement of the quality factor (Q=10–20) for frequencies up to 0.2 GHz. Our results indicate the large potential of using bulk ferrites for rf applications in a hybrid inductor assembly process. © 2004 American Institute of Physics.
ACCESSION #
13154684

 

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