High-quality radio-frequency inductors on silicon using a hybrid ferrite technology

Saidani, M.; Gijs, M. A. M.
May 2004
Applied Physics Letters;5/31/2004, Vol. 84 Issue 22, p4496
Academic Journal
We have realized millimeter-size rf inductors on silicon using a polyimide mold–copper electroplating coil technology. Subsequently, the coils are assembled with magnetic cover plates of commercially available bulk Ni–Zn ferrites of high resistivity. Using the magnetic flux-amplifying ferrite plates, we obtain a 40% enhancement of the inductance and a 25% enhancement of the quality factor (Q=10–20) for frequencies up to 0.2 GHz. Our results indicate the large potential of using bulk ferrites for rf applications in a hybrid inductor assembly process. © 2004 American Institute of Physics.


Related Articles

  • Optical properties and structure of microcrystalline hydrogenated silicon prepared by radio-frequency magnetron sputtering. Logothetidis, S.; Kiriakidis, G. // Journal of Applied Physics;9/1/1988, Vol. 64 Issue 5, p2389 

    Examines the optical properties of hydrogenated microcrystalline silicon films prepared by radio frequency magnetron sputtering. Function of the spectroscopic ellipsometry; Differences between amorphous and microcrystalline films; Factors that control the microcrystallite formation; Effect of...

  • Study of rf-sputtered yttrium oxide films on silicon by capacitance measurements. Ling, C. H.; Bhaskaran, J.; Choi, W. K.; Ah, L. K. // Journal of Applied Physics;6/15/1995, Vol. 77 Issue 12, p6350 

    Presents a study which investigated radio frequency-sputtered yttrium oxide films on silicon substrates by capacitance measurements. Experimental details; Results and discussion; Conclusion.

  • Properties and photovoltaic applications of microcrystalline silicon films prepared by rf reactive sputtering. Moustakas, T. D.; Maruska, H. Paul; Friedman, R. // Journal of Applied Physics;7/15/1985, Vol. 58 Issue 2, p983 

    Presents a study that investigated the properties and photovoltaic applications of microcrystalline silicon films prepared by radio frequency reactive sputtering. Merits of microcrystalline films for the p and n contacts in photovoltaic devices; Deposition of undoped microcrystalline silicon...

  • Tuning magnetization dynamic properties of Fe–SiO2 multilayers by oblique deposition. Phuoc, Nguyen N.; Xu, Feng; Ong, C. K. // Journal of Applied Physics;Jun2009, Vol. 105 Issue 11, p113926 

    The static and dynamic magnetic properties of Fe–SiO2 multilayers fabricated onto Si(100) substrates by a radio frequency sputter-deposition system are investigated as functions of deposition angle and Fe thickness. By changing the oblique deposition angle, one can effectively tune the...

  • Ferromagnetic resonance, transverse bias initial inverse susceptibility and torque studies of magnetic properties of Co2MnSi thin films. Belmeguenai, M.; Tuzcuoglu, H.; Berling, D.; Chérif, S. M.; Roussigné, Y.; Devolder, T.; Westerholt, K. // EPJ Web of Conferences;2013, Issue 40, p18001-p.1 

    Magnetic properties of Co2MnSi thin films of 20 nm and 50 nm in thickness grown by radio frequency sputtering on a-plane sapphire substrates have been studied. X-ray diffraction (XRD) revealed that the cubic <110> Co2MnSi axis is normal to the substrate and that well defined preferential...

  • Angle dependence of the ferromagnetic resonance linewidth and two magnon losses in pulsed laser... Srivastava, Anuj K.; Hurben, Michael J. // Journal of Applied Physics;6/1/1999, Vol. 85 Issue 11, p7838 

    Examines the dependence of the ferromagnetic resonance (FMR) field and linewidth on the angle between the external field and the film normal for pulsed laser deposition (PLD) ferrite films. Introduction of the two magnon scattering concept of FMR; Description of the PLD ferrite film samples;...

  • Structure of multilayered Cr(Al)N/SiOx nanocomposite coatings fabricated by differential pumping co-sputtering. Kawasaki, Masahiro; Nose, Masateru; Onishi, Ichiro; Shiojiri, Makoto // Applied Physics Letters;11/11/2013, Vol. 103 Issue 20, p201913 

    A Cr(Al)N/38 vol. % SiOx hard coating was prepared on a (001) Si substrate at 250 °C in a differential pumping co-sputtering system, which has two chambers for radio frequency (RF) sputtering and a substrate holder rotating on the chambers. The composite coating was grown by alternate...

  • Structural and magnetic properties of Co-Nb/Pd multilayers. Yan, Shi-shen; Liu, Yi-hua; Zheng, Min; Mei, Liang-mo; Chen, Jin-geng; Huang, Jie // Journal of Applied Physics;11/1/1995, Vol. 78 Issue 9, p5563 

    Presents information on a study which prepared cobalt-niobium/palladium multilayers by radio frequency sputtering method. Experimental details; Results of low-angle x-ray diffraction; Conclusion.

  • Structure and magnetic properties of high coercive NdFeB films with a perpendicular anisotropy. Serrona, L. K. E. B.; Sugimura, A.; Adachi, N.; Okuda, T.; Ohsato, H.; Sakamoto, I.; Nakanishi, A.; Motokawa, M.; Ping, D. H.; Hono, K. // Applied Physics Letters;3/17/2003, Vol. 82 Issue 11, p1751 

    Relatively good hard magnetic properties obtained from Nd[sub 2]Fe[sub 14]B films prepared by the rf sputtering technique were investigated in terms of the microstructural development. Although as-deposited films on Mo substrates deposited at substrate temperatures (T[sub s]) of 365°C were...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics