TITLE

Probing local coordination environments in high-k materials for gate stack applications

AUTHOR(S)
McComb, D. W.; Craven, A. J.; Hamilton, D. A.; M. MacKenzie
PUB. DATE
May 2004
SOURCE
Applied Physics Letters;5/31/2004, Vol. 84 Issue 22, p4523
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Using electron energy-loss spectroscopy, the oxygen K-edge excitation in a range of crystalline standards relevant to candidate high-k materials has been examined. The spectra have been modeled using electronic structure calculations in order to understand the influence of the local coordination environment on the data. The knowledge obtained is used to probe the local atomic structure in thin amorphous films of “HfSiO.” © 2004 American Institute of Physics.
ACCESSION #
13154675

 

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