TITLE

Resist patten collapse prevention for the sub-90nm node

AUTHOR(S)
Kitano, Junichi; Honma, Mitsutake
PUB. DATE
May 2004
SOURCE
Microlithography World;May2004, Vol. 13 Issue 2, p18
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Presents information on finishing-up by improved rinse materials (FIRM), a process for reducing pattern collapse. Strategies for reducing the surface tension of the rinse solution; Steps for FIRM treatment; Effect of FIRM treatment on the etching process.
ACCESSION #
13136656

 

Related Articles

  • Salty solutions near a charged modulated interface. Travesset, A. // European Physical Journal E -- Soft Matter;Aug2005, Vol. 17 Issue 4, p435 

    Charged monolayers at a liquid-vapor interface may be found in a crystalline state, resulting in a surface density of charge that displays periodic modulations. In this paper we discuss how these modulations affect different thermodynamical and mechanical properties (compared with the equivalent...

  • Surface properties of diluted aqueous solutions of tert-butyl alcohol. Glinski, Jacek; Chavepeyer, Guy; Platten, Jean-Karl // Journal of Chemical Physics;2/1/1995, Vol. 102 Issue 5, p2113 

    Surface tension σ of aqueous solutions of tert-butyl alcohol (2-methyl-2-propanol) was measured in the temperature range between 278 and 303 K using Wilhelmy plate method. The surface entropies and enthalpies are calculated. The results are interpreted in terms of changing structure of...

  • Effect of temperature on the density and surface tension of aqueous solutions of HMT. Blanco, L.; Vargas, O.; Suárez, A. // Journal of Thermal Analysis & Calorimetry;Apr2011, Vol. 104 Issue 1, p101 

    In this study, a systematic study of the effect of the temperature on the density and surface tension of HMT (hexamethylentetramine) in water was developed. The density and surface tension were determined at temperatures of 288.15, 293.15, 298.15, 303.15, and 308.15 K. Precise data of surface...

  • Surface tension and capillary waves at the nematic-isotropic interface in ternary mixtures of liquid crystal, colloids, and impurities. Popa-Nita, V.; Oswald, P. // Journal of Chemical Physics;9/14/2007, Vol. 127 Issue 10, p104702 

    In mixtures of thermotropic liquid crystals with spherical poly(methyl methacrylate) particles, self-supporting networklike structures are formed during slow cooling past the isotropic-to-nematic phase transition. Experimental results support the hypothesis that a third component, alkane...

  • Adsorption and rheological characteristics of humic acid salts at liquid-gas interfaces. Khil'ko, S.; Kovtun, A.; Fainerman, V.; Rybachenko, V. // Colloid Journal;Dec2010, Vol. 72 Issue 6, p857 

    Du Noöy ring and oscillating droplet methods are used to study the adsorption and dilatation rheological characteristics (viscoelastic modulus and phase angle) of aqueous solutions of humic acid salts at liquid-gas interfaces. It is established that the equilibrium surface tension and...

  • Effect of substrate preparation on smectic liquid-crystal alignment. III. The significance of thermal history. Smela, Elisabeth; Martínez-Miranda, Luz J. // Journal of Applied Physics;3/1/1995, Vol. 77 Issue 5, p1930 

    Presents a study which determined the effect of substrate preparation on smectic liquid-crystal alignment. Description of the process of cooling from the isotropic phase; Role of the cooling rate in the alignment of the liquid-crystal molecules; Surface tension and energy cost of an interface.

  • Temperature dependence of surface tension and capillary waves at liquid metal surfaces. Kolevzon, V. // Journal of Experimental & Theoretical Physics;Dec98, Vol. 87 Issue 6, p1105 

    The temperature dependence of the surface tension γ(T) is treated theoretically and experimentally. The theoretical model based on the Gibbs thermodynamics of a one-component fluid relates δγ/δT to the surface excess entropy density -ΔS. All specific surface effects, namely...

  • Thermodynamic formula for the reversible work of forming a noncritical cluster from the vapor in multicomponent systems. Nishioka, Kazumi; Mori, Atsushi // Journal of Chemical Physics;11/1/1992, Vol. 97 Issue 9, p6687 

    A thermodynamic formula is derived for the reversible work of forming a noncritical liquid cluster from the vapor in multicomponent systems. It is found that the commonly used formula may be used but, for a given state of the parent vapor phase, the value of the surface tension for the critical...

  • Surface-tension- and coupled buoyancy-driven instability in a horizontal liquid layer. Overstability and exchange of stability. Gouesbet, G.; Maquet, J.; Rozé, C.; Darrigo, R. // Physics of Fluids A;Jun90, Vol. 2 Issue 6, p903 

    Overstability for simultaneous surface-tension- and buoyancy-driven instability in a horizontal infinite liquid layer is theoretically investigated by means of a small disturbance analysis. Formulation and results are given in dimensionless forms. Critical wavenumbers, time constants, and...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics