TITLE

Low-Power RF Plasma Sources for Technological Applications: I. Plasma Sources without a Magnetic Field

AUTHOR(S)
Vavilin, K. V.; Rukhadze, A. A.; Ri, M. Kh.; Plaksin, V. Yu.
PUB. DATE
May 2004
SOURCE
Technical Physics;May2004, Vol. 49 Issue 5, p565
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A general analytical theory is developed and numerical simulations are carried out of cylindrical plasma sources operating at an industrial frequency of f = 13.56 MHz (ω = 8.52×107s–1). Purely inductive surface exciters of electromagnetic fields (exciting antennas) are considered; the exciters are positioned either at the side surface of the cylinder or at one of its end surfaces. In the latter case, the plasma flows out of the source through the opposite end of the cylinder. A study is made of both elongated systems in which the length L of the cylinder exceeds its diameter 2R and planar disk-shaped systems with L < 2R. The electromagnetic fields excited by the antenna in the plasma of the source are determined, and the equivalent plasma resistance, as well as the equivalent rf power deposited in the plasma, is calculated. © 2004 MAIK “Nauka / Interperiodica”.
ACCESSION #
13079867

 

Related Articles

  • Initial stage of gas discharge in an inhomogeneous electric field. Belomyttsev, S. Ya.; Romanchenko, I. V.; Ryzhov, V. V.; Shklyaev, V. A. // Technical Physics Letters;May2008, Vol. 34 Issue 5, p367 

    A model of the initial stage of gas discharge has been developed within the framework of the particle in cell (PIC) method, with allowance for the space charge and particle collisions described using the Monte Carlo (MC) numerical simulation technique. The PIC/MC simulations of the initial stage...

  • External magnetic field influence on Hα line in abnormal glow discharge. Obradović, B. M.; Dojcčinović, I. P.; Kuraica, M. M.; Purić, J. // Applied Physics Letters;4/3/2006, Vol. 88 Issue 14, p141502 

    Influence of the external axial magnetic field on the hydrogen Hα line profiles in an abnormal glow discharge has been studied. It has been found that the applied magnetic field predominantly increases the intensity of central component of the characteristic excessively broadened Hα...

  • Numerical Simulation of Two-Dimensional Structure of Glow Discharge in View of the Heating of Neutral Gas. Surzhikov, S. // High Temperature;Nov2005, Vol. 43 Issue 6, p825 

    A two-dimensional computer model of glow discharge is given, which takes into account the heating of ambient gas and the external electric circuit. The structure of a glow discharge in molecular nitrogen is investigated numerically in the pressure range from 1 to 20 torr at an electric field...

  • Cold-Hollow-Cathode Arc Discharge in Crossed Electric and Magnetic Fields. Schanin, P. M.; Koval, N. N.; Akhmadeev, Yu. Kh.; Grigoriev, S. V. // Technical Physics;May2004, Vol. 49 Issue 5, p545 

    A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10–2–10–1 Pa, magnetic-field- and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the...

  • Physical model of the cathode spot retrograde motion. Bobrov, Yu. K.; Bystrov, V. P.; Rukhadze, A. A. // Technical Physics;May2006, Vol. 51 Issue 5, p567 

    A physical model is proposed that describes the retrograde motion of a dc arc cathode spot as a process of plasma propagation in the direction opposite to the Poynting vector (against the Lorenz force).

  • An experimental stand for studying a high-current discharge in a dense gas. Budin, A. V.; Losev, S. Yu.; Pinchuk, M. E.; Rutberg, F. G.; Savvateev, A. F. // Instruments & Experimental Techniques;Jul2006, Vol. 49 Issue 4, p549 

    Experimental studies performed at the Institute for Electrophysics and Electric Power, Russian Academy of Sciences, that aimed at both the study of physics of a high-current pulsed discharge in a superdense gas and the improvement of various prototypes of pulsed facilities allowed a number of...

  • Simulation of Hysteresis in Glow Discharge. Mizuno, N.; Tomioka, U.; Hayashi, T.; Kawabe, T. // AIP Conference Proceedings;2003, Vol. 669 Issue 1, p453 

    The hysteresis of the glow discharge in VI space has been investigated by the numerical simulation. The simulation code has been formed by combination of the equation of the discharge current and the equation of the circuit. We have shown that the hysteresis is produced by the instability of the...

  • Direct current high-pressure glow discharges. Stark, Robert H.; Schoenbach, Karl H. // Journal of Applied Physics;2/15/1999, Vol. 85 Issue 4, p2075 

    Presents information on a study which demonstrated the stabilization and control of a high-presure glow discharge by means of a microhollow cathode discharge. Concepts of discharges; Experimental setup; Results and discussion.

  • Influence of a Transverse Magnetic Field on the Characteristics of a DC Gas Discharge. Pashnev, V. K.; Strel'nitskij, V. E.; Opalev, O. A.; Gritsyna, V. I.; Vyrovets, I. I.; Bizyukov, Yu. A. // Plasma Physics Reports;Sep2004, Vol. 30 Issue 9, p797 

    The influence of a transverse magnetic field and the working-gas pressure on the rotation frequency of the current channel, as well as on the electric field in the positive column and the cathode voltage drop in a dc gas discharge, was studied experimentally. The working gases were pure hydrogen...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics