Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity

Shuxiang Dong; Feiming Bai; Li Yan; Hu Cao; Jie-Fang Li; Viehland, D.
May 2004
Applied Physics Letters;5/24/2004, Vol. 84 Issue 21, p4144
Academic Journal
It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89° phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (∼7 ppm) to leakage of H2 gas. © 2004 American Institute of Physics.


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