TITLE

Control of surface roughness in amorphous thin-film growth

AUTHOR(S)
Elsholz, F.; Schöll, E.; Rosenfeld, A.
PUB. DATE
May 2004
SOURCE
Applied Physics Letters;5/24/2004, Vol. 84 Issue 21, p4167
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The growth of optical layers of SiO2 and Nb2O5 on amorphous substrates is investigated. We develop a kinetic Monte Carlo model which mimics the amorphous structure by randomly fluctuating binding energies. The resulting surface profiles are characterized by their root-mean-square roughness, height–height correlation functions, and growth exponents. For strong random fluctuations, the growth exponents exceed the value of 0.5, in good agreement with experiment. © 2004 American Institute of Physics.
ACCESSION #
13077542

 

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